Advantages of Microwave Plasma cleaning Technology in Integrated Circuit Packaging
In the process of integrated circuit packaging, all kinds of pollutants will be produced, including nickel, photoresist, epoxy resin and oxide, which will reduce the product quality. microwave plasma cleaning technology, as a precision dry cleaning technology, can effectively remove these pollutants, improve the surface properties of materials and increase the surface energy of materials.
Plasma is an ionized gas with roughly equal density of positive ions and electrons, which is electrically neutral as a whole.
Plasma cleaning is a process in which plasma is used to treat the surface of workpiece at molecular level by chemical or physical action to remove stains and improve surface performance.
The exciting power frequency of microwave plasma is 2.45GHz, and the microwave discharge is electrodeless discharge, which prevents the pollution caused by sputtering, so a uniform and pure plasma with higher density can be obtained.
It is suitable for the preparation and treatment of high purity materials, and the process efficiency is higher.
The process parameters are set by the control system, and the intensity and density of microwave plasma are controlled to meet the process requirements of different cleaned components.
Microwave frequencies have two decisive advantages over other frequencies:
1. The high ion concentration makes the reaction faster and the reaction time shorter.
2. Low self-bias voltage, no electrical damage to cleaning components.
Microwave plasma cleaning technology has been widely used in IC packaging because of its advantages such as environmental protection, good cleaning uniformity, good repeatability, high controllability, three-dimensional processing ability and directional selection.
Microwave plasma cleaning technology has been widely used in many fields abroad. however, the research on microwave plasma cleaning technology and equipment in China is still in its infancy. Dongguan Shengding Precision instrument Co., Ltd., adhering to the concept of independent research and development and domestic substitution, has been ploughing the field of plasma cleaning for ten years. Shengding precision independently developed microwave plasma cleaning machine has long been put on the market, and by virtue of technical advantages and service advantages. It has been well received by the customer group.