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SPV-12ZIn-Line Vacuum Plasma Cleaner

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SPV-12ZIn-Line Vacuum Plasma Cleaner

RF online wafer vacuum cleaner for semiconductor industry, PLASMA treatment online wafer plasma treatment system

Device parameters
model numberSPV-12Z
Equipment size1650*1318*1803mm(L*W*H)
RF Power Supply Power 0-600W Frequency 13.56MHZ
capacity12 liters (length 500*width 340*height 70mm)
Number of rails 4*2 (divided into waiting area and processing area)
Air configurationStandard two-way, argon/oxygen (can be customized)
system controlIndustrial control system

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