| model numberSPMV-100H | |
| Equipment size1500*1280*2000mm(L*W*H) | |
| microwave power supply Power 3KW Frequency 2.45GMHZ | capacity100L 450*450*450mm (L*W*H) |
| Cleaning product range Lead frame: 260mm*65mm (L*W) | |
| Box size range290mm*75mm*160mm(L*W*H) | |
| vacuum pumpOil or dry pump | |
| Air configuration Standard oxygen and argon two-way process gas (CF4 gas can be customized) | |
| system controlPLC control system | |
