CN

Home/ Product/ SPV-200Vacuum Plasma Cleaner

SPV-200Vacuum Plasma Cleaner

Product Comparison

SPV-200列表图片.png

SPV-200Vacuum Plasma Cleaner

Customizable assembly line automation scheme, low gas consumption, strong stability, reducing labor and use costs

Appearance parameters
model numberSPV-200 External dimensions1050*1050*1700mm (L*W*H)
weight 800KG Device Appearance Colorsilver grey
Power system
RF Power Supply
power:0~1000W frequency:13.56MHz
IF power supply
power0~2000W frequency40KHz
vacuum system
Cavity Internal Dimensions600*600*600mm(W*H*D)
thickness25mm
materialAluminum alloy (customized stainless steel cavity)
tightnessMilitary grade welded seal
Electrode plate effective size472*451mm(W*D)
Available space spacing35mm
working space8 floors
work trayOne set is standard, and the material is optional (aluminum, steel mesh)
Electrode plate layoutHorizontal arrangement, movable extraction
pump setDouble stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump
vacuum lineAll stainless steel pipes, and high-strength vacuum bellows
gas system
Flow range0~300SCCM Process gas pathStandard two-way, can be customized (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride)
Control System
system controlPLC interactive mode7 inch touch screen

{{item.Title}}{{item.subtitle}}

{{item.Info}}

Add product

Please select the product you would like to add to compare

{{item.Title}}

{{item.Info}}

TOP