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SPV-150Vacuum Plasma Cleaner

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SPV-150列表图片.png

SPV-150Vacuum Plasma Cleaner

Military-grade welding process, strong vacuum chamber sealing, high-density plasma source, uniform cleaning in all directions

Appearance parameters
model numberSPV-150 External dimensions1100*940*1755mm (L*W*H)
weight 600KG Device Appearance Colorsilver grey
Power system
RF Power Supply
power:0~600W frequency:13.56MHz
IF power supply
power0~2000W frequency40KHz
vacuum system
Cavity Internal Dimensions500*500*600mm(W*H*D)
thickness25mm
materialAluminum alloy (customized stainless steel cavity)
tightnessMilitary grade welded seal
Electrode plate effective size372*451mm(W*D)
Available space spacing24mm
working space8 floors
work trayOne set is standard, and the material is optional (aluminum, steel mesh)
Electrode plate layoutHorizontal arrangement, movable extraction
pump setDouble stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump
vacuum lineAll stainless steel pipes, and high-strength vacuum bellows
gas system
Flow range0~300SCCM Process gas pathStandard two-way, can be customized (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride)
Control System
system controlPLC interactive mode7 inch touch screen

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