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SPV-60Vacuum Plasma Cleaner

Product Comparison

SPV-60列表图片.png

SPV-60Vacuum Plasma Cleaner

It is specially designed for surface modification of materials with large areas and complex shapes, and is an ideal choice for cleaning, modification and etching.

Appearance parameters
model numberSPV-60 External dimensions950*900*1650mm (L*W*H)
weight 350KG Device Appearance Colorsilver grey
Power system
RF Power Supply
power:0~600W frequency:13.56MHz
IF power supply
power0~1000W frequency40KHz
vacuum system
Cavity Internal Dimensions375*375*430mm(W*H*D)
thickness25mm
materialAluminum alloy (customized stainless steel cavity)
tightnessMilitary grade welded seal
Electrode plate effective size345*344mm(W*D)
Available space spacing22mm
working space6 floors
work trayOne set is standard, and the material is optional (aluminum, steel mesh)
Electrode plate layoutHorizontal arrangement, movable extraction
Double stage rotary vane pump (oil pump)40m3/h
vacuum lineAll stainless steel pipes, and high-strength vacuum bellows
gas system
Flow range0~300SCCM Process gas pathStandard air circuit, can be customized
Control System
system controlPLC interactive mode7 inch touch screen

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